发明名称 HANDLER AND PART INSPECTION APPARATUS
摘要 A handler comprises: a base having an opening part; a first hand for returning a returning object; a first returning unit for returning the first hand to the upper part of the opening part and lowering the first hand; a second hand for returning the returning object; a second returning unit for returning the second hand to the upper part of the opening part and lowering the second hand; and a control unit for controlling operation of the first returning unit and operation of the second returning unit; wherein the first hand and the second hand are closely arranged to the upper part of the opening part to be aligned with the opening part side by side.
申请公布号 KR20130139818(A) 申请公布日期 2013.12.23
申请号 KR20130148659 申请日期 2013.12.02
申请人 SEIKO EPSON CORPORATION 发明人 HASEGAWA NOBUO;FUJIMORI HIROAKI;SHIMOJIMA TOSHIOKI
分类号 G01R31/26;H01L21/66;H01L21/677 主分类号 G01R31/26
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