发明名称 |
HANDLER AND PART INSPECTION APPARATUS |
摘要 |
A handler comprises: a base having an opening part; a first hand for returning a returning object; a first returning unit for returning the first hand to the upper part of the opening part and lowering the first hand; a second hand for returning the returning object; a second returning unit for returning the second hand to the upper part of the opening part and lowering the second hand; and a control unit for controlling operation of the first returning unit and operation of the second returning unit; wherein the first hand and the second hand are closely arranged to the upper part of the opening part to be aligned with the opening part side by side. |
申请公布号 |
KR20130139818(A) |
申请公布日期 |
2013.12.23 |
申请号 |
KR20130148659 |
申请日期 |
2013.12.02 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
HASEGAWA NOBUO;FUJIMORI HIROAKI;SHIMOJIMA TOSHIOKI |
分类号 |
G01R31/26;H01L21/66;H01L21/677 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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