发明名称 |
PURIFICATION OF TRICHLOROSILANE |
摘要 |
Systems and methods for removing boron-containing contaminants from a composition comprising trichlorosilane to form a purified product comprising trichlorosilane are disclosed. Purification columns and devices, having various locations of inlet and outlet ports, are fluidly connected to each other in order to remove various types of boron species and other impurities present in TCS. |
申请公布号 |
WO2013067283(A3) |
申请公布日期 |
2013.12.19 |
申请号 |
WO2012US63209 |
申请日期 |
2012.11.02 |
申请人 |
GTAT CORPORATION |
发明人 |
HAZELTINE, BRUCE;FAHRENBRUCK, SCOTT;QIN, WENJUN |
分类号 |
C01B33/107;B01D3/14 |
主分类号 |
C01B33/107 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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