| 摘要 |
The present invention relates to a valve for a helium gas control system of an electrostatic chuck, which comprises a sensing rod passing through a valve cap and having the bottom end positioned in an air chamber and the top end positioned on the top of the valve cap; and a valve motion sensing unit provided on the top of the sensing rod and having a sensing sensor for sensing a lifting position of the sensing rod. When a drive air feed line and a drive air feed tube that are deviated from their positions or torn off bring about an air leakage and line bending, and thus drive air cannot be fed into an air operation part and a valve operation part is not opened, the sensing rod and the sensing sensor sense that the valve operation part is not opened and transmit a signal of the sensing result to a device control part so that the device control part can stop a process, whereby the occurrence of serious process defects can be prevented. |
