发明名称 RESIN STAMPER MANUFACTURING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a resin stamper manufacturing apparatus capable of efficiently manufacturing a plurality of resin stampers.SOLUTION: A resin stamper manufacturing apparatus 1 manufactures: a support base material storage unit 2 configured to store a plurality of support base materials 22; and a plurality of intermediate resin stampers 20 by transferring a fine structure 10a of a previously prepared matrix stamper 10 to a photocurable resin composition applied to the support base material 22, and also manufactures a plurality of resin stampers 30 by transferring a fine structure 20a of the intermediate resin stamper 20 to the photocurable resin composition applied to the support base material 22.
申请公布号 JP2013251301(A) 申请公布日期 2013.12.12
申请号 JP20120122918 申请日期 2012.05.30
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 WASHITANI RYUTA;OGINO MASAHIKO;SHIZAWA NORITAKE;MORI KYOICHI;MIYAUCHI AKIHIRO
分类号 H01L21/027;B29C33/40;B29C59/02;G11B5/84 主分类号 H01L21/027
代理机构 代理人
主权项
地址