发明名称 |
RESIN STAMPER MANUFACTURING APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a resin stamper manufacturing apparatus capable of efficiently manufacturing a plurality of resin stampers.SOLUTION: A resin stamper manufacturing apparatus 1 manufactures: a support base material storage unit 2 configured to store a plurality of support base materials 22; and a plurality of intermediate resin stampers 20 by transferring a fine structure 10a of a previously prepared matrix stamper 10 to a photocurable resin composition applied to the support base material 22, and also manufactures a plurality of resin stampers 30 by transferring a fine structure 20a of the intermediate resin stamper 20 to the photocurable resin composition applied to the support base material 22. |
申请公布号 |
JP2013251301(A) |
申请公布日期 |
2013.12.12 |
申请号 |
JP20120122918 |
申请日期 |
2012.05.30 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
WASHITANI RYUTA;OGINO MASAHIKO;SHIZAWA NORITAKE;MORI KYOICHI;MIYAUCHI AKIHIRO |
分类号 |
H01L21/027;B29C33/40;B29C59/02;G11B5/84 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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