发明名称 SAMPLE HOLDER AND METHOD FOR FIXING OBSERVATION SAMPLE
摘要 <p>[Problem] To provide a sample holder allowing for favorable observation of a cross-sectional sample using a retarding method. [Solution] The sample holder includes: a sample placement member (17) on which a first fixing member (121), a cross-sectional sample (7) as an observation sample, and a second fixing member (122) are placed in contact with each other, and inserted inside the electronic optical lens barrel of an electron microscope; and a voltage introduction means for introducing a voltage to the sample placement member. The sample placement member has a positioning section for positioning the first fixing member, the cross-sectional sample, and the second fixing member onto a placement position. A positioning section (201) positions the first planar surface (402A) of the first fixing member and the second planar surface (402B) of the second fixing member which are disposed respectively adjacent to the observation surface (401) of the cross-sectional sample, parallel to the observation surface at locations equidistant from the observation surface.</p>
申请公布号 WO2013183543(A1) 申请公布日期 2013.12.12
申请号 WO2013JP65065 申请日期 2013.05.30
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 KOYAMA KAZUHIRO;AKATSU MASAHIRO
分类号 H01J37/20;H01J37/28 主分类号 H01J37/20
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