Structured light contour sensing system for measuring contour of surface has control module to control micro electro mechanical system (MEMS) mirrors based on focus quality to maintain Scheimpflug tilt condition between lens and image plane

摘要

The structured light contour sensing system has a control module and an optical system. The orientation of plane of sharp focus of the optical system comprised by lens (60) and imager (62) is described when lens plane (61) is not parallel to image plane (63). The image plane corresponds to MEMS mirror (64) that reflects light from lens into imager. The control module receives data from imager corresponding to captured light and controls the first set of MEMS mirrors based on quality of focus to maintain a Scheimpflug tilt condition between the lens plane of focus and the image plane of focus.