| 摘要 |
The present invention relates to a capacitive immunoaffinity biosensor, more particularly, including a structure with a vertically laminated electrode, and a manufacturing method thereof. An electrode structure according to the present invention includes a substrate, a first electrode which is formed on at least one surface of the substrate, a parylene thin film layer which is formed on the first electrode, and a second electrode which is formed on the parylene thin film. |
