| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical pen for a chromatic range sensor (CRS) usable for a probe device for a three-dimensional coordinate measuring machine (CMM).SOLUTION: An optical pen 220A forms a confocal optical system and includes an exchangeable optical mechanism 280, a base member 282 for the optical pen, and an exchange mount 285 that is repeatedly exchangeable at high speed. The confocal optical system includes a confocal aperture 295 and a chromatic dispersion optical member 250. The optical mechanism 280 includes the chromatic dispersion optical member 250. The base member 282 includes an external attachment surface for attaching an external reference frame. The exchange mount 285 includes a first one side member inside the base member 282 and a second one side member inside the optical mechanism 280. The exchange mount 285 is composed so that the base member 282 receives and holds the optical mechanism 280. Thus, the optical mechanism 280 is fixed to a position facing the base member 282 and the external reference frame. |
