| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of simplifying a manufacturing process of a vibrator of a vibration type transducer.SOLUTION: A method of manufacturing a vibration type transducer includes: a film forming step in which a second semiconductor layer 120 and a first semiconductor layer 130 are stacked in this order on a first semiconductor substrate 110; an etching step in which two groove sections whose upper and lower part are wider are formed in parallel in an internal area including the second semiconductor layer 120; and an annealing step in which an annealing treatment is performed in a hydrogen atmosphere. In the etching step, anisotropic etching and isotropic etching can be repeatedly performed. |
