| 摘要 |
A temperature measuring unit and a temperature measuring apparatus using the same are provided to improve quality of a thin film deposited on a wafer in an evaporator by making a member for installing a temperature sensor with incombustible materials. A temperature measuring unit(100) comprises a first member(110), a second member(120), and a temperature sensor(130). The first member is made of incombustible materials and provided with a contact portion(111) which comes in contact with a test object(10). The second member, made of incombustible materials, presses the contact portion of the first member to the test object. The temperature sensor is attached to the contact portion of the first member to sense heat of the test object transmitted through the first member. The first member further includes a body(112) extending from the contact portion. The second member includes a space into which the body of the first member is screwed. The temperature sensor passes through the body of the first member. The second member has threads(122) to be fastened to the test object. |
