发明名称 POLISHING COMPOSITION
摘要 This polishing composition is used in applications in which an object to be polished containing a phase-change alloy is polished, and is characterized by containing a reducing agent. The polishing composition may contain abrasive grains, and if the polishing composition contains abrasive grains, said grains are preferably colloidal silica.
申请公布号 WO2013179720(A1) 申请公布日期 2013.12.05
申请号 WO2013JP56746 申请日期 2013.03.12
申请人 FUJIMI INCORPORATED 发明人 IZAWA, YOSHIHIRO;YOSHIZAKI, YUKINOBU
分类号 H01L21/304;B24B37/00 主分类号 H01L21/304
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