发明名称 |
MANUFACTURING METHOD OF PERMANENT FILM FOR OPTICAL MATERIAL, CURED FILM MANUFACTURED BY THE SAME, AND ORGANIC EL DISPLAY DEVICE AND LIQUID CRYSTAL DISPLAY DEVICE USING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a permanent film for an optical material capable of exhibiting excellent photosensitive characteristics in exposure using a half-tone mask, and appropriately forming an interlayer insulating film (permanent film) suitable for an organic EL display device and a liquid crystal display device.SOLUTION: A manufacturing method of a permanent film for an optical material includes the step of irradiating a photosensitive resin composition with an active radiation selected from a g-ray, an h-ray, and an i-ray through a half-tone phase difference mask having transmittance in a phase shifter part of 0.1% or more and 50% or less to expose the resin composition. The photosensitive resin composition contains (A) a specific crosslinkable polymer, (B) an optical acid generating agent, and (C) a solvent; and the (A) specific crosslinkable polymer is a combination of specific copolymers or specific polymers. |
申请公布号 |
JP2013242537(A) |
申请公布日期 |
2013.12.05 |
申请号 |
JP20130078764 |
申请日期 |
2013.04.04 |
申请人 |
FUJIFILM CORP |
发明人 |
SATAKE AKIRA;ANDO TAKESHI;YAMASHITA SHIE;NAKAMURA HIDEYUKI |
分类号 |
G03F7/039;C08F212/14;C08F220/26;G03F7/40;H01L21/027 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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