发明名称 MANUFACTURING METHOD OF PERMANENT FILM FOR OPTICAL MATERIAL, CURED FILM MANUFACTURED BY THE SAME, AND ORGANIC EL DISPLAY DEVICE AND LIQUID CRYSTAL DISPLAY DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a permanent film for an optical material capable of exhibiting excellent photosensitive characteristics in exposure using a half-tone mask, and appropriately forming an interlayer insulating film (permanent film) suitable for an organic EL display device and a liquid crystal display device.SOLUTION: A manufacturing method of a permanent film for an optical material includes the step of irradiating a photosensitive resin composition with an active radiation selected from a g-ray, an h-ray, and an i-ray through a half-tone phase difference mask having transmittance in a phase shifter part of 0.1% or more and 50% or less to expose the resin composition. The photosensitive resin composition contains (A) a specific crosslinkable polymer, (B) an optical acid generating agent, and (C) a solvent; and the (A) specific crosslinkable polymer is a combination of specific copolymers or specific polymers.
申请公布号 JP2013242537(A) 申请公布日期 2013.12.05
申请号 JP20130078764 申请日期 2013.04.04
申请人 FUJIFILM CORP 发明人 SATAKE AKIRA;ANDO TAKESHI;YAMASHITA SHIE;NAKAMURA HIDEYUKI
分类号 G03F7/039;C08F212/14;C08F220/26;G03F7/40;H01L21/027 主分类号 G03F7/039
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