发明名称 PIEZOELECTRIC DEVICE
摘要 A piezoelectric device has a first electrode film, a piezoelectric film provided on the first electrode film, and a second electrode film provided on the piezoelectric film. At least one of the pair of electrode films is composed of an alloy, and a major component of the alloy is a metal selected from the group consisting of Ti, Al, Mg, and Zn.
申请公布号 US2013320814(A1) 申请公布日期 2013.12.05
申请号 US201213487563 申请日期 2012.06.04
申请人 SAKUMA HITOSHI;KURACHI KATSUYUKI;AIDA YASUHIRO;MAEJIMA KAZUHIKO;NAKAJIMA MAYUMI;TDK CORPORATION 发明人 SAKUMA HITOSHI;KURACHI KATSUYUKI;AIDA YASUHIRO;MAEJIMA KAZUHIKO;NAKAJIMA MAYUMI
分类号 H01L41/16 主分类号 H01L41/16
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