| 摘要 |
A charged particle beam drawing device comprises: a number operation unit for operating the number of a plurality of other correction sections written before a correction section, the correction section being used to calculate amounts of temperature rise, to ensure that a calculation time for calculating amounts of temperature rise for the all correction sections to be written does not exceed an average writing time of the correction section for correcting a pattern size change caused by resist heating determined by using a dose of a charged particle beam, a current density of the charged particle beam, and a settling time between shots of the charged particle beam, an average calculation time for calculating the amount of temperature rise of the correction section caused by heat transfer from one of other correction sections written before the correction section, and a calculation time for calculating the amounts of temperature rise for the all correction section to be written by using a degree of parallelism of a computer for calculating the amounts of temperature rise; a representative temperature calculation unit for calculating a representative temperature of the correction section based on heat transfer from other correction sections of the number written before the correction section for each of the all correction sections; a dose modulation unit for inputting a dose of the charged particle beam irradiated on the correction section and modulating the dose of the charged particle beam irradiated on the correction section by using the representative temperature of the correction section, for each of the all correction sections; and a writing unit for writing a pattern onto the correction section by the charged particle beam of the modulated dose. [Reference numerals] (120) Bias control circuit;(130,132,134,136) DAC amp;(140) Writing data;(50) Shot dividing unit;(52) Correction section shot assigning unit;(54) Correction section average writing time calculating unit;(55) Heat extension calculation stopping index calculating unit;(56) Correction section writing order setting unit;(58) Correction section charge amount calculating unit;(60) Correction section heat extension calculating unit;(62) Correction section representation temperature calculation unit;(64) Irradiation amount map writing unit;(66) Irradiation amount modulating unit;(68) Irradiation time calculating unit;(70) Writing processing unit;(72) Memory;(AA) Order information |
