| 摘要 |
<p>The present invention relates to a multi-layered striping system with lifting devices. The purpose of the present invention is to maximize the productivity of semiconductor producing facilities by effectively utilizing the workplace for semiconductor manufacturing processes and placing more lines than before in the same space. In order to achieve the purpose, the striping system among semiconductor manufacturing processes according to the present invention comprises: a first apparatus; a second apparatus which is placed above the first apparatus; lifting devices which are symmetrically installed at both ends of the first and second apparatus and raise or lower a substrate which is finished in a strip process or rinse process. As a result, the productivity of the semiconductor producing facilities can be maximized by effectively utilizing the workplace for semiconductor manufacturing processes and placing more lines than before in the same space.</p> |
