ZNO FILM HAVING CONTROLLABLE ELECTRICAL AND OPTICAL PROPERTIES AND MANUFACTURING METHOD THEREOF

摘要

A present invention includes a substrate and a ZnO thin film formed on the substrate. The ZnO thin film is irradiated with heavy ions of high energy to provide the ZnO thin film of which the energy level changes, and change electronic structures, optical properties, and electrical properties such as surface roughness and the nanostructure of a surface, the mobility of a material, and improve the electrical properties of a device by controlling the mobility and reliability in room temperature, and improve the photocatalytic effect of the ZnO thin film and a property as a UV blocking agent. [Reference numerals] (AA) Start;(BB) End;(S10) Form a ZnO thin film;(S20) Determine emitted energy and ion types;(S30) Emit heavy ions of high energy;(S40) Evaluate physical, electrical, and optical properties