发明名称 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method of the same, which can make a surface of a metal electrode arranged on an outermost surface be flat or smooth.SOLUTION: A semiconductor device 1 including an SiC epitaxial layer 3 having an uneven shape which is formed on an outermost surface on which a semiconductor element (MOSFET) is arranged and which is formed based on a height difference H, and a source electrode 13 made of metallic material which is formed on the SiC epitaxial layer 3, comprises a polysilicon layer 12 which has a smoother surface 121 compared with the uneven shape and which is provided between a surface 31 of the SiC epitaxial layer 3 and the source electrode 13.
申请公布号 JP2013239489(A) 申请公布日期 2013.11.28
申请号 JP20120109950 申请日期 2012.05.11
申请人 ROHM CO LTD 发明人 NAKANO YUUKI;NAKAMURA RYOTA
分类号 H01L29/78;H01L21/336;H01L29/12 主分类号 H01L29/78
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