发明名称 Phase Plate for a TEM
摘要 A phase plate, specifically a Zernike type phase plate, for use in an electron microscope, comprises a central hole, and a thin film causing a phase shift of the electrons passing through said film. This phase shift causes the Contrast Transfer Function (CTF) to change from a sine-like function to a cosine-like function. The phase plate is equipped with a film in the form of an annulus, carried by a much thinner film. As a result only in a small spatial frequency range (for low frequencies) the phase is changed (and thus the CTF), and for other spatial frequencies the phase shift is negligible, and thus the CTF remains unchanged. Due to the much smaller thickness of the carrier film the scattering of electrons is negligible as well.
申请公布号 US2013313428(A1) 申请公布日期 2013.11.28
申请号 US201313896103 申请日期 2013.05.16
申请人 FEI COMPANY 发明人 BUIJSSE BART
分类号 H01J37/26 主分类号 H01J37/26
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