Piezo-electric substrate and manufacturing method of the same

摘要

A piezo-electric substrate 1 is mainly comprised of a base material 11, and a film 12 formed on one main surface of the base material 11. In the base material 11, the main surface on which the film 12 is formed is a roughed main surface 11a. The piezo-electric substrate 1 is obtained by forming the film 12 comprised of a material with a coefficient of linear expansion smaller than a coefficient of linear expansion of the base material 11 on the roughened main surface 11a using a thermal spraying method.