发明名称 Photomasks and methods of fabricating the same
摘要 A photomask includes a pattern area and a blind area, a first opaque pattern disposed on the blind area and having a first thickness, and a second opaque pattern disposed on the pattern area and having a second thickness smaller than the first thickness. The first and second opaque patterns are formed of the same material.
申请公布号 US8592105(B2) 申请公布日期 2013.11.26
申请号 US201113231313 申请日期 2011.09.13
申请人 JANG IL-YONG;KIM BYUNG-GOOK;SAMSUNG ELECTRONICS CO., LTD. 发明人 JANG IL-YONG;KIM BYUNG-GOOK
分类号 G03F1/00 主分类号 G03F1/00
代理机构 代理人
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