发明名称 |
Apparatus and Method for Deposition for Organic Films |
摘要 |
The invention provides apparatus and methods for organic continuum vapor deposition of organic materials on large area substrates.
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申请公布号 |
US2013305990(A1) |
申请公布日期 |
2013.11.21 |
申请号 |
US201313864527 |
申请日期 |
2013.04.17 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF MICHIGAN;THE REGENTS OF THE UNIVERSITY OF MICHIGAN |
发明人 |
FORREST STEPHEN R.;YANG FAN;LUNT RICHARD |
分类号 |
B05D1/00 |
主分类号 |
B05D1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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