| 摘要 |
PROBLEM TO BE SOLVED: To surely prevent etching solution being infiltrated between a sealing material and a substrate.SOLUTION: A method of manufacturing an inkjet recording head 1 includes: a channel formation process S11 to form an energy generation element and a channel forming part on a surface of a substrate 201; an opening process S12 to open a part of a protective film; a coating process S13 to apply the adhesive on a surface of a substrate 201 and on the channel forming part; a pressing process S14 to press a sealing material 240 and the adhesive; a mounting process S15 to mount a pressure member 300 on the substrate 201; an immersion process S16 to form a supply hole from a rear surface of the substrate 201 by immersing the substrate 201 in an etching solution and the rear surface of the substrate 201 where the protective film is not formed being etched; and a peeling process S17 to peel off the sealing material 240 from the substrate 201. |
