SUBLIMABLE AROMATIC COMPOUND REMOVING UNIT FOR PROCESS GAS ANALYZING DEVICE, AND PROCESS GAS ANALYZING DEVICE INCLUDING THE SAME

摘要

A process gas analyzing device is provided. The process gas analyzing device may include a sample gas introducing unit configured to introduce a process gas including a sublimable aromatic compound; a sublimable aromatic compound removing unit configured to remove the sublimable aromatic compound; a process gas pretreatment unit arranged between the sample gas introducing unit and the sublimable aromatic compound removing unit; and a gas analyzing unit arranged in a downstream position of the sublimable aromatic compound removing unit. The sublimable aromatic compound removing unit may include an adsorbent of activated carbon including a non-volatile acid.