发明名称 SUBSTRATE FIXING DEVICE FOR SUBSTRATE MANUFACTURING PROCESS
摘要 <p>The present invention relates to a substrate fixing device for a substrate manufacturing process. The substrate fixing device for a substrate manufacturing process according to the present invention includes a substrate sliding prevention guide on clamps which are formed on the upper and lower parts of a jig transferred to each process along a hanger and which clamp the top and the underside of the substrate. The substrate sliding prevention guide guides the clamping of the substrate via the front end portion of the guide so that the present invention facilitates the prevention of a clamping error which the substrate is not clamped by the clamps.</p>
申请公布号 KR101331714(B1) 申请公布日期 2013.11.20
申请号 KR20120063676 申请日期 2012.06.14
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 MYUNG, JAE HO;LEE, HEE SEG;JO, SEONG CHEOL;BAEK, HA WOON
分类号 H01L21/677;B65G49/07;C25D17/06 主分类号 H01L21/677
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