| 发明名称 |
CONTAMINATE DETECTION AND SUBSTRATE CLEANING |
| 摘要 |
Detection of periodically repeating nanovoids is indicative of levels of substrate contamination and may aid in reduction of contaminants on substrates. Systems and methods for detecting nanovoids, in addition to, systems and methods for cleaning and/or maintaining cleanliness of substrates are described. |
| 申请公布号 |
KR20130125352(A) |
申请公布日期 |
2013.11.18 |
| 申请号 |
KR20137002930 |
申请日期 |
2011.07.08 |
| 申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
KHUSNATDINOV NIYAZ;LABRAKE DWAYNE L. |
| 分类号 |
B29C33/72;B29C33/38;B29C33/42;B29C59/02 |
主分类号 |
B29C33/72 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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