发明名称 |
FABRICATE SELF-FORMED NANOMETER PORE ARRAY AT WAFER SCALE FOR DNA SEQUENCING |
摘要 |
A technique is provided for a structure. A substrate has a nanopillar vertically positioned on the substrate. A bottom layer is formed beneath the substrate. A top layer is formed on top of the substrate and on top of the nanopillar, and a cover layer covers the top layer and the nanopillar. A window is formed through the bottom layer and formed through the substrate, and the window ends at the top layer. A nanopore is formed through the top layer by removing the cover layer and the nanopillar.
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申请公布号 |
US2013299945(A1) |
申请公布日期 |
2013.11.14 |
申请号 |
US201213469220 |
申请日期 |
2012.05.11 |
申请人 |
STOLOVITZKY GUSTAVO A.;WANG DEQIANG;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
STOLOVITZKY GUSTAVO A.;WANG DEQIANG |
分类号 |
H01L29/02 |
主分类号 |
H01L29/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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