PARTICLE MATTER DETECTION ELEMENT, MANUFACTURING METHOD THEREOF, AND PARTICLE MATTER DETECTION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable PM detection element that minimizes undetectable mass, and to provide a manufacturing method thereof.SOLUTION: In a particle matter detection element (4, 4a-g), at least a pair of detection electrodes includes a detection electrode layer laminate 1 formed of substantially flat first and second detection electrode layers 11A and 11B having an electrode layer thickness Tof 50 μm or more and 500 μm or less and facing each other across a substantially flat intermediate insulating layer 10 having an insulating layer thickness Tof 3 μm or more and 20 μm or less. An end surface where a cross section in a lamination direction is exposed, is used as a detection surface.