METHOD OF FABRICATING NANO IMPRINT MOLD, NANO IMPRINT MOLD FABRICATED BY THE METHOD AND METHOD OF FABRICATING LIGHT EMITTING DIODE WITH THE NANO IMPRINT MOLD

摘要

The present invention relates to a method of fabricating a nanoimprint mold. The method of fabricating the nanoimprint mold according to the present invention applies polymers on a base, forms a preliminary nanopattern corresponding to a first nanopattern by imprinting the first nanopattern on the polymer with a master template having the first nanopattern and forms a second nanopattern by changing the shape of the preliminary nanopattern. The method of fabricating the nanoimprint mold according to the present invention provides the nanoimprint mold having various nanopatterns manufactured from a single master template, including the change of the preliminary nanopattern shape. The present invention provides a method for fabricating a light emitting diode having a nanopattern on the surface by using the nanoimprint mold, wherein the nanopattern effectively prevents the total internal reflection of the light emitting diode, thereby improving the extraction efficiency of the light emitting diode.