发明名称 |
Apparatus for vapor condensation and recovery |
摘要 |
Methods and apparatus for recovery of precursor vapor from a gas and precursor vapor mixture used in a deposition process. The gas and precursor vapor mixture is passed through a multitude of heat transfer surfaces in a heat conducting housing causing the precursor vapor to condense. The precursor vapor in liquid form is then collected after condensation. |
申请公布号 |
US2013295749(A1) |
申请公布日期 |
2013.11.07 |
申请号 |
US201213680331 |
申请日期 |
2012.11.19 |
申请人 |
LIU BENJAMIN Y.H.;DINH THUC M.;MA YAMIN |
发明人 |
LIU BENJAMIN Y.H.;DINH THUC M.;MA YAMIN |
分类号 |
H01L21/02;F25B21/02;F25J1/00 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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