| 摘要 |
PROBLEM TO BE SOLVED: To maintain flatness by restraining a hanging-down phenomenon of a panel local part when transferring various panels of a thin plate large area.SOLUTION: A carrying plate for a large area panel includes a lower plate 10 for forming a groove-shaped air chamber 13 filled with air received by supply from an external part on one surface, an air branch plate 20 provided in an upper part of the lower plate 10 and forming a plurality of air roads 21 branched off by receiving the supply of air from the air chamber 13, and an upper plate 30 provided in an upper part of the air branch plate 20 and formed with air holes 33 for jetting air to the upper side by receiving the supply of air from the air roads 21. The air road 21 is constituted of a quick road 21a for forming a narrow clearance so that the air quickly flows and a delay road 21b having a resistance element so that the air flows at a relatively slow speed to the delay road. |
