| 摘要 |
PROBLEM TO BE SOLVED: To enable parallel execution of an inspection by image processing and a visual inspection by an inspector so as to reduce inspection time as a whole.SOLUTION: A substrate appearance inspection method includes: an imaging step of sequentially imaging an inspection target substrate at each area by a camera; an image recognition step of recognizing an image of a defect candidate in the inspection target substrate by sequentially processing the image at each area obtained at the imaging step; and a defect candidate area image display step to be executed before a completion of image recognition processing of the last area at the image recognition at the latest, the step of displaying an image of an area in which a defect candidate is recognized at the image recognition step, being an image of an area having undergone image the recognition processing before the last area, so as to allow a visual inspection by a user. |
