| 摘要 |
PURPOSE: A substrate tray and a substrate separation module are provided to prevent damage of a substrate by preventing residual pressure generated between the substrate and the tray. CONSTITUTION: A substrate separation part(130) is expanded from one surface of a stage(140). The substrate separation part separates a substrate from a tray by being inserted into a penetration hole. The substrate separation part includes a pneumatic chamber. A diaphragm is arranged on one end of the pneumatic chamber. A lifting part(160) controls a gap between the tray and the stage. |
