发明名称 METHOD FOR MANUFACTURING COMPOUND SEMICONDUCTOR THIN FILM AND METHOD FOR MANUFACTURING COMPOUND THIN FILM SOLAR CELL
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a compound semiconductor thin film and a method for manufacturing a compound thin film solar cell, capable of safely, inexpensively, and uniformly performing selenide processing in a short time.SOLUTION: A method for manufacturing a compound semiconductor thin film includes the steps of: forming a reaction precursor thin film 13 composed of copper and indium or copper, indium, and gallium on a substrate 11; providing a coating layer 14 by applying a selenium oxide solution onto the reaction precursor thin film 13; and changing the reaction precursor thin film 13 provided with the coating layer 14 to selenide by rapidly heating the reaction precursor thin film in a heating chamber.
申请公布号 JP2013229405(A) 申请公布日期 2013.11.07
申请号 JP20120099279 申请日期 2012.04.24
申请人 HANG-ICHI:KK 发明人 INOUE YOSHIO;KANAI TSUTOMU
分类号 H01L31/04 主分类号 H01L31/04
代理机构 代理人
主权项
地址