发明名称 Methods of forming a pattern on a substrate
摘要 A method of forming a pattern on a substrate includes forming a repeating pattern of four first lines elevationally over an underlying substrate. A repeating pattern of four second lines is formed elevationally over and crossing the repeating pattern of four first lines. First alternating of the four second lines are removed from being received over the first lines. After the first alternating of the four second lines have been removed, elevationally exposed portions of alternating of the four first lines are removed to the underlying substrate using a remaining second alternating of the four second lines as a mask. Additional embodiments are disclosed and contemplated.
申请公布号 US8575032(B2) 申请公布日期 2013.11.05
申请号 US201113101485 申请日期 2011.05.05
申请人 LIGHT SCOTT L.;DEVILLIERS ANTON J.;MICRON TECHNOLOGY, INC. 发明人 LIGHT SCOTT L.;DEVILLIERS ANTON J.
分类号 H01L21/311 主分类号 H01L21/311
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