发明名称 THERMAL SPRAYING POWDER AND METHOD FOR FORMING THERMAL SPRAY COATING
摘要 <p>A first thermal spray powder of the present invention includes granulated and sintered yttria particles obtained by manufacturing a raw material power and sintering the raw material power in air or oxygen. The primary particles constituting the granulated and sintered yttria particles have an average particle size of 0.5-1.5 ��which is more than 1.11 times as large as the raw material powder. A thermal spray layer which has high etching resistance about plasma having the output power of more than 0.8 W/cm2 formed on the thermal coating of a unit area by the first thermal spray powder. A second thermal spray powder of the present invention includes granulated and sintered yttria particles obtained by manufacturing the raw material power and sintering the raw material power in air or oxygen. The primary particles constituting the granulated and sintered yttria particles have an average particle size of 3-8 �� A thermal spray layer which has high etching resistance about plasma having the output power of less than 0.8 W/cm2 formed on the thermal coating of a unit area by the second thermal spray powder.</p>
申请公布号 KR20130120434(A) 申请公布日期 2013.11.04
申请号 KR20130121551 申请日期 2013.10.11
申请人 FUJIMI INCORPORATED 发明人 KITAMURA JUNYA;IBE HIROYUKI;SUGIYAMA YOSHIKAZU
分类号 C01F17/00;H01L21/203 主分类号 C01F17/00
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