发明名称 |
PRODUCTION METHOD FOR PERMANENT FILM FOR OPTICAL MATERIAL, CURED FILM PRODUCED THEREBY, AND ORGANIC EL DISPLAY DEVICE AND LIQUID-CRYSTAL DISPLAY DEVICE USING SAME |
摘要 |
<p>Provided is a production method for a permanent film for optical material in which a photosensitive resin composition is exposed to light in order to remove the photosensitive portion thereof, and the remainder is cured to form a permanent film. The photosensitive resin composition contains (A) a specific crosslinkable polymer, (B) a 1,2-quinone diazide compound and (C) a solvent. The resin is exposed to light by irradiating the photosensitive resin composition with active radiation selected from among g-rays, h-rays, and i-rays through a halftone phase shift mask of which the transmission rate occurring in the phase shifter section thereof is 0.1-50%.</p> |
申请公布号 |
WO2013161942(A1) |
申请公布日期 |
2013.10.31 |
申请号 |
WO2013JP62213 |
申请日期 |
2013.04.25 |
申请人 |
FUJIFILM CORPORATION |
发明人 |
SATAKE, RYO;ANDO, TAKESHI;YAMASHITA, SHIE;NAKAMURA, HIDEYUKI |
分类号 |
G03F7/023;G02F1/1333;G02F1/1368;G03F1/32;H01L51/50;H05B33/22 |
主分类号 |
G03F7/023 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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