THIN-FILM SOLAR CELL DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

It is an object of the present invention to achieve a thin film solar cell device of higher power generation efficiency, and particularly, the present invention is applied to a thin film solar call device having a tandem structure in which a transparent electrode layer is inserted between a back surface electrode layer and a photoelectric conversion layer and between a plurality of stacked photoelectric conversion layers. A first electricity conducting path (6) is obtained by forming a thin film made of a conductive material (of which the specific resistance < 10 -4 ©cm) in a micropore penetrating an intermediate transparent electrode layer (4) and a first insulating layer (5), for electrically connecting a first photoelectric conversion layer (3) and a second photoelectric conversion layer (7) to each other. A second electricity conducting path (16) having the same structure also electrically connects the second photoelectric conversion layer (7) and a back surface electrode layer (9) to each other. The gross area of an electricity conducting path constituted of the first electricity conducting path (6) and the second electricity conducting path (16) is set in a range not less than 1×10 -7 and not more than 4×10 -6 relative to the area of the cell. The conductive material is any one of platinum, gold, chromium, ruthenium, and titanium nitride.