发明名称 Floating body memory cell having gates favoring different conductivity type regions
摘要 A method for fabricating floating body memory cells (FBCs), and the resultant FBCs where gates favoring different conductivity type regions are used is described. In one embodiment, a p type back gate with a thicker insulation is used with a thinner insulated n type front gate. Processing, which compensates for misalignment, which allows the different oxide and gate materials to be fabricated is described.
申请公布号 US8569812(B2) 申请公布日期 2013.10.29
申请号 US201213534985 申请日期 2012.06.27
申请人 INTEL CORPORATION;CHANG PETER L. D.;AVCI UYGAR E.;KENCKE DAVID L.;BAN IBRAHIM 发明人 CHANG PETER L. D.;AVCI UYGAR E.;KENCKE DAVID L.;BAN IBRAHIM
分类号 H01L29/76;H01L21/00;H01L21/336;H01L21/8234;H01L21/8238;H01L21/84;H01L27/088;H01L29/66 主分类号 H01L29/76
代理机构 代理人
主权项
地址