| 摘要 |
A micro electromechanical (MEMS) antenna (36) is positioned on one side of a substrate and is connected to a MEMS switch comprising a capacitor bridge (46) and to a transmission line (42) by means of a thru hole or via (48) which forms an electrically conducting path through the substrate. This arrangement provides a common ground plane for the antenna and switch and shields the switch from the electromagnetic radiation received or transmitted from the antenna. The switch may comprise a topmost metal layer which extends across a bridge structure formed by a polymer layer (19). The polymer layer comprises poly-monochloro-para-xylene (parylene-C). Homogeneous or heterogeneous antenna array structures are implemented. The antenna arrays may include one or more different type of antennas with for example different shapes, rotations and reflections.
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