| 摘要 |
PROBLEM TO BE SOLVED: To enable highly precise defect inspection of an object under inspection using a laser ultrasonic method without going through separate processes of surface polishing and surface condition measurement of the object under inspection.SOLUTION: A laser ultrasonic inspection device 10 comprises; a transmission laser beam generator 11 which irradiates an object under inspection 1 with a transmission laser beam A to induce an ultrasonic wave; a reception laser beam generator 13 which irradiates the object under inspection with a reception laser beam B to receive the ultrasonic wave propagating through the object under inspection; a reception interferometer 15 which measures the ultrasonic wave from change in phase of a reflection C of the reception laser beam B and outputs an ultrasonic signal; and an imaging unit 16 which detects defects on the object under inspection by forming an image from the ultrasonic signal at multiple points. The laser ultrasonic inspection device 10 includes a reflection light intensity measurement unit 17, which is noise removal means for identifying a reflection light signal whose peak intensity value is improper due to influence of surface condition of the object under inspection as noise, and detects defects by means of the imaging unit 16 using the reflection light signal with proper peak intensity values while removing noise using the reflection light intensity measurement unit 17. |
