发明名称 BIPOLAR JUNCTION TRANSISTORS WITH REDUCED BASE-COLLECTOR JUNCTION CAPACITANCE
摘要 Methods for fabricating a device structure such as a bipolar junction transistor, device structures for a bipolar junction transistor, and design structures for a bipolar junction transistor. The device structure includes a collector region formed in a substrate, an intrinsic base coextensive with the collector region, an emitter coupled with the intrinsic base, a first isolation region surrounding the collector region, and a second isolation region formed at least partially within the collector region. The first isolation region has a first sidewall and the second isolation region having a second sidewall peripherally inside the first sidewall. A portion of the collector region is disposed between the first sidewall of the first isolation region and the second sidewall of the second isolation region.
申请公布号 US2013277804(A1) 申请公布日期 2013.10.24
申请号 US201213452335 申请日期 2012.04.20
申请人 CHENG PENG;HARAME DAVID L.;LEIDY ROBERT K.;LIU QIZHI;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHENG PENG;HARAME DAVID L.;LEIDY ROBERT K.;LIU QIZHI
分类号 H01L29/732;G06F17/50;H01L21/331 主分类号 H01L29/732
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