Method for transferring substrate e.g. glass pane into vacuum treatment plant, involves transporting substrate composite into transfer chamber and reducing spacing within substrate composite in transport direction of substrates

摘要

The method involves introducing a substrate composite (2) from two substrates (5,6) into a lock chamber (C1) arranged behind in transport direction of the substrate. The substrate composite is transported into a transfer chamber (C3). The spacing within the substrate composite in transport direction of the substrates is reduced.