发明名称 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE HAVING ELEMENT ISOLATING REGION OF TRENCH TYPE
摘要 Disclosure is semiconductor device of a selective gate region, comprising a semiconductor layer, a first insulating film formed on the semiconductor layer, a first electrode layer formed on the first insulating layer, an element isolating region comprising an element isolating insulating film formed to extend through the first electrode layer and the first insulating film to reach an inner region of the semiconductor layer, the element isolating region isolating a element region and being self-aligned with the first electrode layer, a second insulating film formed on the first electrode layer and the element isolating region, an open portion exposing a surface of the first electrode layer being formed in the second insulating film, and a second electrode layer formed on the second insulating film and the exposed surface of the first electrode layer, the second electrode layer being electronically connected to the first electrode layer via the open portion.
申请公布号 US2013270622(A1) 申请公布日期 2013.10.17
申请号 US201313837552 申请日期 2013.03.15
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MATSUI MICHIHARU;MORI SEIICHI;SHIROTA RIICHIRO;TAKEUCHI YUJI;KAMIGAICHI TAKESHI
分类号 H01L29/788 主分类号 H01L29/788
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