发明名称 TRANSPORT DEVICE FOR PLATE-SHAPED OBJECTS
摘要 The invention provides a plate-shaped body conveying device capable of preventing pollution of the plate-shaped body. The plate-shaped body conveying device comprises an air supply type support mechanism supplying clean air to the lower surface of the plate-shaped body and supporting the plate-shaped body in a non-contact way; a propulsive force endowing mechanism rotatingly driving plural rotary rollers contacting and supporting the end of the plate-shaped body lower surface in the horizontal direction through a driving mechanism and endowing the plate-shaped body with an upward propulsive force; and a support body freely supporting the plural rotary rollers on the inner side of the horizontal direction of the plural rotary rollers. A guide part is formed inside the plate-shaped body conveying device. The guide part which makes the inner side and the outer side of the horizontal direction of the support body communicated further makes the air flowing along the lower surface of the conveyed plate-shaped body and the along the horizontal direction among the plural rotary rollers and flowing from the inner side of the horizontal direction of the support body to the outer side at the same height as the lower surface of the conveyed plate-shaped body.
申请公布号 KR101317731(B1) 申请公布日期 2013.10.15
申请号 KR20110030115 申请日期 2011.04.01
申请人 发明人
分类号 B65G49/06;B65G51/03;G02F1/13;H01L21/677 主分类号 B65G49/06
代理机构 代理人
主权项
地址