发明名称 NON-PLANAR TRANSISTORS AND METHODS OF FABRICATION THEREOF
摘要 The present description relates to the formation source/drain structures within non-planar transistors, wherein fin spacers are removed from the non-planar transistors in order to form the source/drain structures from the non-planar transistor fins or to replace the non-planar transistor fins with appropriate materials to form the source/drain structures.
申请公布号 US2013264617(A1) 申请公布日期 2013.10.10
申请号 US201113993332 申请日期 2011.09.30
申请人 JOSHI SUBHASH M.;HATTENDORF MICHAEL 发明人 JOSHI SUBHASH M.;HATTENDORF MICHAEL
分类号 H01L29/66;H01L29/78 主分类号 H01L29/66
代理机构 代理人
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