PIEZOELECTRIC/ELECTROSTRICTIVE FILM TYPE ELEMENT AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostrictive film type element whose electric field induced distortion is improved without increasing cost.SOLUTION: The piezoelectric/electrostrictive film type element includes: a substrate; a lower electrode film; a piezoelectric/electrostrictive body film; and an upper electrode film. The substrate and the lower electrode film are fastened. The piezoelectric/electrostrictive body film and the lower electrode film are fastened. The piezoelectric/electrostrictive body film is composed of a lead system piezoelectric/electrostrictive ceramic. The lead system piezoelectric/electrostrictive ceramic has a microstructure in which a compound containing platinum and lead is segregated in a grain.