OBJECT TRANSFER SYSTEM, EXPOSURE APPARATUS, METHOD FOR MANUFACTURING FLAT PANEL DISPLAY, DEVICE MANUFACTURING METHOD, OBJECT HOLDING APPARATUS, OBJECT TRANSFER APPARATUS, OBJECT TRANSFER METHOD, AND OBJECT REPLACING METHOD

摘要

A liquid crystal exposure apparatus (10) is provided with: a substrate holder (30) that is capable of holding a substrate (P); and a carry-in apparatus (50), which includes a fork hand (52) that is capable of supporting the substrate (P) from below, and which carries the substrate (P) to the substrate holder (30) from the outside of the liquid crystal exposure apparatus (10) using the fork hand (52). The substrate holder (30) has a roller apparatus (38), which guides the fork hand (52) when the fork hand (52) that has transferred the substrate (P) to the substrate holder (30) moves in the direction to be away from the substrate holder (30).