| 摘要 |
PROBLEM TO BE SOLVED: To make a display speed faster through efficient parallel processes.SOLUTION: A charged particle beam drawing device 1 includes a layer determination section 4a which determines a layer as a unit of parallel processes by comparing an element size in a layer of drawing data of a layer structure having elements by layers with a display object size determined by an enlargement rate, and a parallel process section 4b which performs a series of processes for displaying elements in parallel for each of elements in the layer as the unit of parallel processes determined by the layer determination section 4a. |
