| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measurement method for reducing a measurement error to be generated resulting from deviation between a coordinate system of a shape measurement device and a coordinate system of a jig, etc. without complicating a device configuration.SOLUTION: A shape measurement method has: a step (a) of scanning a stylus along a predetermined scanning route on a workpiece to be arranged in a first direction in a mounting surface to acquire first shape data on the scanning route; a step (b) of rotating the workpiece from which the first shape data is acquired in the step (a) around an axis orthogonal to the mounting surface to change a direction of the workpiece from the first direction to a second direction; a step (c) of scanning the stylus along the scanning route of the workpiece changed to the second direction in the step (b) to acquire second shape data on the scanning route; and a step (d) of calculating third shape data on the scanning route on the basis of the first and second shape data acquired in the step (a) and the step (c), respectively. |
