发明名称 |
LASER CRYSTALLIZATION AND POLYCRYSTAL EFFICIENCY IMPROVEMENT FOR THIN FILM SOLAR |
摘要 |
Apparatus and methods of thermally processing semiconductor substrates are disclosed. Aspects of the apparatus include a source of intense radiation and a rotating energy distributor that distributes the intense radiation to a rectifier. The rectifier directs the radiation toward the substrate. Aspects of the method include using a rotating energy distributor to distribute pulsed energy to a substrate for processing. The rotational rate of the energy distributor is set based on the pulse repetition rate of the energy source. A substrate may be continuously translated with respect to the energy distributor at a rate set based on the pulse repetition rate of the energy source. |
申请公布号 |
WO2013109328(A3) |
申请公布日期 |
2013.10.03 |
申请号 |
WO2012US61676 |
申请日期 |
2012.10.24 |
申请人 |
APPLIED MATERIALS, INC.;MOFFATT, STEPHEN |
发明人 |
MOFFATT, STEPHEN |
分类号 |
H01L31/18;H01L31/042 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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